Electron Transmission Loss - at elevated temperatures
Electron Transmission Loss - at elevated temperatures
Samenvatting
The effect of an elevated sample temperature on the growth rate of carbon in the holes of a Multiple Aperture Array (MAA) has been examined. The loss of transmitted electrons through the MAA was measured by taking pictures with a camera of an Yttrium Aluminum Garnet (YAG) scintillation crystal. The growth rate of carbon in the holes of a MAA at the center of the beam decreased by approximately
30% at 60 0C and by approximately 50% at 150 0C. On the edges of the beam the growth was hardly effected. The difference in growth change between the edge and the center of the beam could be explained by an increased desorption, and a highly increase surface diffusion, but more experiments are needed to verify this.
Organisatie | De Haagse Hogeschool |
Opleiding | TISD Technische Natuurkunde |
Afdeling | Academie voor Technologie, Innovatie & Society Delft |
Partner | Mapper Lithography |
Jaar | 2014 |
Type | Bachelor |
Taal | Engels |